The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 7319508 B1

PDF
Full Text
Expired
Date of Patent:
Jan. 15, 2008

Filed:

Jul. 24, 2007
Applicants:

Yasuhiro Omura, Tokyo, JP;

Naomasa Shiraishi, Urawa, JP;

Soichi Owa, Toyko, JP;

Inventors:

Yasuhiro Omura, Tokyo, JP;

Naomasa Shiraishi, Urawa, JP;

Soichi Owa, Toyko, JP;

Assignee:

Nikon Corporation, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/54 (2006.01); G03B 27/42 (2006.01);
U.S. Cl.
CPC ...
Abstract

A catadioptric optical system forms an image of a first surface onto a second surface. The system includes a first lens having a first optical axis, a combination of a concave mirror and a second lens, the combination having a second optical axis, a third lens having a third optical axis, a first reflection plane that is arranged in an optical path between the first lens and the combination, and a second reflection plane that is arranged in an optical path between the combination and the third lens. An intersection line of an extension plane of the first reflection plane and an extension plane of the second reflection plane is set up so that the first optical axis, the second optical axis and the third optical axis intersect at one point. In addition, at least one of the first lens and the third lens is movable.


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Omura, Yasuhiro. (2008). Projection exposure apparatus and method, catadioptric optical system and manufacturing method of devices (U.S. Patent No. 7319508). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7319508

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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