The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 08, 2008
Filed:
Dec. 27, 2004
Marcel Bontekoe, Veldhoven, NL;
Patricius Aloysius Jacobus Tinnemans, Hapert, NL;
Lambertus Gerardus Maria Kessels, Aalst-Waalre, NL;
Marco Cornelis Jacobus Martinus Van Hassel, Zundert, NL;
Wouter Frans Willem Mulckhuyse, Bussum, NL;
Marcel Bontekoe, Veldhoven, NL;
Patricius Aloysius Jacobus Tinnemans, Hapert, NL;
Lambertus Gerardus Maria Kessels, Aalst-Waalre, NL;
Marco Cornelis Jacobus Martinus Van Hassel, Zundert, NL;
Wouter Frans Willem Mulckhuyse, Bussum, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A lithography apparatus including a projection system configured to project a beam of radiation as an array of sub-beams of radiation and an array of individually controllable elements configured to modulate the sub-beams of radiation to form a requested dose pattern on a substrate. The requested dose pattern is built up over time from an array of localized exposures in which at least neighboring localized exposures are imaged at substantially different times and in which each localized exposure is produced by one of the sub-beams of radiation. The lithography apparatus also includes a rasterizer device arranged to convert data defining the requested dose pattern to a sequence of data representing the requested dose at a corresponding sequence of points within the pattern, and also a data manipulation device arranged to receive the sequence of data and constitute a control signal suitable for controlling the array of individually controllable elements.