The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 08, 2008
Filed:
Apr. 21, 2005
Po-sung Kuo, Tainan, TW;
Yung-dar Chen, Hsinchu, TW;
Dar-rung Kuo, Taipei, TW;
Ming-chien Wen, Hsinchu, TW;
Ming-tsong Wang, Taipei, TW;
Po-Sung Kuo, Tainan, TW;
Yung-Dar Chen, Hsinchu, TW;
Dar-Rung Kuo, Taipei, TW;
Ming-Chien Wen, Hsinchu, TW;
Ming-Tsong Wang, Taipei, TW;
Taiwan Semiconductor Manufacturing Co., Ltd., Hsin-Chu, TW;
Abstract
An exhaust system and a mini-exhaust static pressure controlling apparatus thereof for controlling a process area. The mini-exhaust static pressure controlling apparatus has an exhaust chamber and an auto release damping device. The exhaust chamber has an air inlet connected to the process area receiving air exhaust from the process area, and an air outlet venting the air exhaust. The auto release damping device has a diaphragm pre-stressed in an arc shape with a coefficient of elasticity and an adjusting device for applying a stress on the diaphragm to maintain the arc shape of the diaphragm, and is disposed on the exhaust chamber to control static pressure of the air exhaust in the exhaust chamber.