The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 01, 2008
Filed:
Nov. 15, 2004
Jon B. Dcamp, Savage, MN (US);
Harlan L. Curtis, Champlin, MN (US);
Lori A. Dunaway, New Hope, MN (US);
Max C. Glenn, Chanhassen, MN (US);
Jon B. DCamp, Savage, MN (US);
Harlan L. Curtis, Champlin, MN (US);
Lori A. Dunaway, New Hope, MN (US);
Max C. Glenn, Chanhassen, MN (US);
Honeywell International Inc., Morristown, NJ (US);
Abstract
An automated process for performing MEMS packaging including automatically attaching a die to a chip carrier, resulting in a chip carrier assembly, automatically moving the chip carrier assembly into a vacuum chamber, wherein the vacuum chamber includes one or more lids therein, automatically securing a lid to the chip carrier assembly within the vacuum chamber, thereby forming a packaged die, and automatically removing the packaged die from the vacuum chamber. Unique vacuum chambers suitable for MEMS packaging are also disclosed.