The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 25, 2007
Filed:
Jun. 14, 2006
Applicants:
Ming-rong Fu, Taoyuan Hsien, TW;
Hsin-chien Tsai, Yunlin County, TW;
Inventors:
Ming-Rong Fu, Taoyuan Hsien, TW;
Hsin-Chien Tsai, Yunlin County, TW;
Assignee:
Taiwan Semiconductor Manufacturing Co., Ltd., Hsin-Chu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G05B 13/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
Automatic methods and systems for manufacturing recipes feedback control. Relationships among manufacturing recipes are determined. Wafers are processed based on the manufacturing recipes. The wafers are measured by metrology tools after processing. Feedback information for the manufacturing recipes is acquired from the metrology tool. The manufacturing recipes are automatically modified according to the feedback information and the determined relationships.