The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 18, 2007
Filed:
Mar. 03, 2005
Andrew Eric Carlson, Higganum, CT (US);
Andrew Eric Carlson, Higganum, CT (US);
Zygo Corporation, Middlefield, CT (US);
Abstract
In general, in one aspect, the invention features apparatus that include an interferometer including a main assembly having two laterally displaced polarizing beam splitter interfaces, wherein the interfaces are positioned to receive two spatially separated beams and direct them each to make at least two passes to one or more remote objects. Each interface reflects and transmits each beam at least once, and the interferometer is configured to combine the two beams after they make the at least two passes to the one or more remote objects to produce an output beam including information about an optical path length difference between paths traveled by the two beams.