The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 11, 2007

Filed:

Jan. 15, 2004
Applicants:

Hisashi Kaneko, Fujisawa, JP;

Motoya Okazaki, Tokyo, JP;

Hiroyuki Toshima, Saitama, JP;

Inventors:

Hisashi Kaneko, Fujisawa, JP;

Motoya Okazaki, Tokyo, JP;

Hiroyuki Toshima, Saitama, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G06F 17/50 (2006.01); G06F 9/455 (2006.01); H01L 21/66 (2006.01); G01R 31/26 (2006.01);
U.S. Cl.
CPC ...
Abstract

According to an aspect of the present invention, there is provided a simulation circuit pattern evaluation method including: designing an aggregate of simulation circuit patterns, which simulate a circuit pattern of a semiconductor integrated circuit, by combining plural geometrical structure defining parameters respectively having at least two states in such a manner that the respective states appear the same number of times in the respective geometrical structure defining parameters; forming the aggregate of the simulation circuit patterns on a substrate; and evaluating the formed aggregate of the simulation circuit patterns.


Find Patent Forward Citations

Loading…