The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 11, 2007
Filed:
Sep. 15, 2004
Haico Victor Kok, Eindhoven, NL;
Koen Kivits, Eindhoven, NL;
Ron Van DE Laak, Eindhoven, NL;
Hans Kuiper, Koog aan de Zaan, NL;
Haico Victor Kok, Eindhoven, NL;
Koen Kivits, Eindhoven, NL;
Ron Van De Laak, Eindhoven, NL;
Hans Kuiper, Koog aan de Zaan, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A method is provided for determining information relating to vibration. The method includes projecting an aerial image at an image position in a projection plane; mapping an intensity of the aerial image into an image map that contains values of coordinates of sampling locations and of the intensity sampled at each sampling location; and measuring intensity of the aerial image received through a slot pattern. The method may also include determining from the image map a detection position of a slope portion of the image map; at the detection position of the slope portion, measuring a temporal intensity of the aerial image and relative positions of the slot pattern and the image position; and determining from the temporal intensity of the aerial image information relating to vibration for the aerial image. The relative positions of the slot can be measured as position-related data of the slot pattern.