The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 11, 2007
Filed:
Dec. 29, 2004
Maurice Philippe Du Mee, Eindhoven, NL;
Edwin Johan Buis, Belfeld, NL;
Johannes Adrianus Antonius Theodorus Dams, Veldhoven, NL;
Johannes Andreas Henricus Maria Jacobs, Veldhoven, NL;
Antoine Hendrik Verweij, Dussen, NL;
Erik Maria Rekkers, Boxtel, NL;
Maurice Philippe Du Mee, Eindhoven, NL;
Edwin Johan Buis, Belfeld, NL;
Johannes Adrianus Antonius Theodorus Dams, Veldhoven, NL;
Johannes Andreas Henricus Maria Jacobs, Veldhoven, NL;
Antoine Hendrik Verweij, Dussen, NL;
Erik Maria Rekkers, Boxtel, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A lithographic apparatus includes a guiding mechanism to guide a movable structure such as a mask blade of a reticle masking device, a movable part connected to the movable structure, and a substantially stationary part to guide the movable part. The movable part includes a nozzle to inject a gas in a gap between the movable and stationary parts, a contactless supply of the gas from the stationary part to the movable part being provided by a gas supply outlet in the stationary part and a gas supply inlet in the movable part. The gas supply outlet includes an inlet trench in a surface of the movable part facing the gas supply outlet of the stationary part, the trench being orientated parallel to a direction of movement of the movable part. The movable part includes a motor drive part and a counter weight part connected to an end of the motor drive part facing away from the movable structure.