The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 11, 2007
Filed:
Nov. 19, 2004
Applicants:
Cornelis Christiaan Ottens, Veldhoven, NL;
Erik Maria Rekkers, Boxtel, NL;
Inventors:
Cornelis Christiaan Ottens, Veldhoven, NL;
Erik Maria Rekkers, Boxtel, NL;
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/42 (2006.01); G02B 7/02 (2006.01);
U.S. Cl.
CPC ...
Abstract
A lithographic apparatus arranged to transfer a pattern from a patterning device onto a substrate. The apparatus includes an optical element, and at least two clamping assemblies for clamping the optical element. The clamping assemblies each include a first clamp with a first clamping surface in contact with a first surface of the optical element and a second clamp with a second clamping surface in contact with a second surface of said optical element, opposite said first surface of said optical element.