The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 11, 2007
Filed:
Apr. 12, 2005
Kohei Yamaguchi, Hitachinaka, JP;
Kazuo Aoki, Hitachinaka, JP;
Seiji Isogai, Hitachinaka, JP;
Masashi Sakamoto, Hitachinaka, JP;
Kohei Yamaguchi, Hitachinaka, JP;
Kazuo Aoki, Hitachinaka, JP;
Seiji Isogai, Hitachinaka, JP;
Masashi Sakamoto, Hitachinaka, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
This SEM has a capability of preventing shift of a view field of the foreign matters at a stage where no sufficient correction is carried out when obtaining the SEM coordinate values used for transforming the coordinate values of the foreign matters on the sample sent from another device into the SEM coordinate values. The SEM selects the foreign matters closer to the center of the sample at first and then the foreign matters spirally from the center of the sample to the outer periphery.