The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 11, 2007
Filed:
Aug. 01, 2006
Urs Wälchli, Chur, CH;
Per Björkman, Pålsböle, FI;
Heikki Saari, Espoo, FI;
Jarkko Antila, Helsinki, FI;
Hansjakob Hanselmann, Oberschan, CH;
Martin Wüest, Malans, CH;
Urs Wälchli, Chur, CH;
Per Björkman, Pålsböle, FI;
Heikki Saari, Espoo, FI;
Jarkko Antila, Helsinki, FI;
Hansjakob Hanselmann, Oberschan, CH;
Martin Wüest, Malans, CH;
Inficon GmbH, Bad Ragaz, CH;
Abstract
A vacuum measuring cell has a first housing body and a membrane, both of AlOceramic or sapphire. The membrane is planar with a peripheral edge joined by a first seal to the first housing body to form a reference vacuum chamber. A second housing body of AlOceramic or sapphire opposite the membrane, is joined to the peripheral edge of the membrane by a second seal to form a measurement vacuum chamber. A port connects the vacuum measuring cell to a medium to be measured. At least in the central area of the first housing body, an optical transparent window is formed and at least the central region of the membrane has an optically reflective surface. Outside the reference vacuum chamber, in opposition to and at a distance from the window, an optical fibre is arranged for feeding in and out light onto the surface of the membrane.