The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 04, 2007
Filed:
Aug. 03, 2006
Martin M. Liphardt, Lincoln, NE (US);
Blaine D. Johs, Lincoln, NE (US);
Jeffrey S. Hale, Lincoln, NE (US);
Craig M. Herzinger, Lincoln, NE (US);
Steven E. Green, Lincoln, NE (US);
Ping He, Lincoln, NE (US);
John A. Woollam, Lincoln, NE (US);
Martin M. Liphardt, Lincoln, NE (US);
Blaine D. Johs, Lincoln, NE (US);
Jeffrey S. Hale, Lincoln, NE (US);
Craig M. Herzinger, Lincoln, NE (US);
Steven E. Green, Lincoln, NE (US);
Ping He, Lincoln, NE (US);
John A. Woollam, Lincoln, NE (US);
J.A. Woollam Co., Inc, Lincoln, NE (US);
Abstract
Spectroscopic ellipsometer systems which include polarizer and analyzer elements which remain fixed in position during data acquisition while at least one continuously rotating or step-wise rotatable compensator imposes a continuously variable or plurality of sequentially discrete polarization states on a beam of electromagnetic radiation, including a system of mirrors and refractive elements for correcting aberation while directing a beam of electromagnetic radiation to a spot on a sample at a multiple different angles-of-incidence.