The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 04, 2007
Filed:
Feb. 20, 2003
Santiago Del Puerto, Milton, NY (US);
Eric R. Loopstra, Heeze, NL;
Andrew Massar, Monroe, CT (US);
Duane P. Kish, Danbury, CT (US);
Abdullah Alikhan, Danbury, CT (US);
Woodrow J. Olson, Stamford, CT (US);
Jonathan H. Feroce, Shelton, CT (US);
Santiago del Puerto, Milton, NY (US);
Eric R. Loopstra, Heeze, NL;
Andrew Massar, Monroe, CT (US);
Duane P. Kish, Danbury, CT (US);
Abdullah Alikhan, Danbury, CT (US);
Woodrow J. Olson, Stamford, CT (US);
Jonathan H. Feroce, Shelton, CT (US);
ASML Holding N.V., , NL;
Abstract
A system and method are used to protect a mask from being contaminated by airborne particles. They include coupling a reticle and a cover to protect the reticle. The cover includes a frame and a movable panel that moves to allow direct access of light to the reticle during an exposure process. The reticle and cover are moved to a stage using a robot gripper. The reticle and cover may be coupled to a baseplate before being moved. Corresponding alignment devices are coupled to the frame and the panel, the gripper and the panel, and the baseplate and the panel. The stage and the frame can have corresponding attachment devices. A pre-alignment device can be used to align the reticle before transporting it to a stage. The pre-alignment device and the frame can have corresponding alignment devices that can be used to perform the pre-alignment. Predetermined areas of the reticle can be hardened or shaped, such that less particles are produced during contact with the reticle.