The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 04, 2007
Filed:
Jan. 05, 2005
Kenji Kanamitsu, Hitachinaka, JP;
Takashi Moriyama, Tsuchiura, JP;
Naohiro Hosoda, Hitachinaka, JP;
Renesas Technology Corp., Tokyo, JP;
Abstract
A method of manufacturing a semiconductor device for preventing dielectric breakdown of gate electrodes attributable to needle-like protrusions caused inside a trench in the step of forming element isolation trench in which includes forming a silicon oxide film over a silicon nitride film as an etching mask for forming element isolation trenches, then cleaning the surface of a substrate with a hydrofluoric acid etching solution to lift off obstacles deposited over the surface of the silicon oxide film, before the step of patterning the silicon nitride film by using as a mask a photoresist film provided with an anti-reflection film therebelow.