The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 04, 2007
Filed:
Mar. 09, 2005
Tomoyuki Okada, Kawasaki, JP;
Masahiko Minemura, Kawasaki, JP;
Mitsuo Sakurai, Kawasaki, JP;
Ryo Tsujimura, Kawasaki, JP;
Tomoyuki Okada, Kawasaki, JP;
Masahiko Minemura, Kawasaki, JP;
Mitsuo Sakurai, Kawasaki, JP;
Ryo Tsujimura, Kawasaki, JP;
Fujitsu Limited, Kawasaki, JP;
Abstract
A method of verifying optical proximity correction includes the steps of generating first mask pattern data from design data under first condition, generating first corrected pattern data by applying optical proximity correction to the first mask pattern data, generating second mask pattern data from the design data under second condition, generating second corrected pattern data by applying optical proximity correction to the second mask pattern data, and comparing the first corrected pattern data and the second corrected pattern data to check whether the first corrected pattern data and the second corrected pattern data match.