The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 04, 2007

Filed:

Jul. 11, 2006
Applicants:

Ozgur Sahin, Stanford, CA (US);

Calvin F. Quate, Menlo Park, CA (US);

Olav Solgaard, Stanford, CA (US);

Inventors:

Ozgur Sahin, Stanford, CA (US);

Calvin F. Quate, Menlo Park, CA (US);

Olav Solgaard, Stanford, CA (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G01B 5/28 (2006.01); G01N 13/10 (2006.01); G12B 21/08 (2006.01); G12B 21/22 (2006.01);
U.S. Cl.
CPC ...
Abstract

A method for measuring high frequency force of interaction between a tip of a cantilever and a sample includes providing a cantilever having a cantilever arm and a probe tip formed on a free end of the cantilever arm where the cantilever arm has a first shape and an axis of torsion associated with the first shape and the probe tip is positioned in an offset displacement from the axis of torsion, vibrating the cantilever at or near the fundamental flexural resonance frequency with a predetermined oscillation amplitude, bringing the cantilever to the vicinity of the sample, tapping the surface of the sample repeatedly using the probe tip, and detecting changes in the amplitude or the phase of a high frequency vibration harmonic of the cantilever as the cantilever is deflected in response to features on the surface of the sample.


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