The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 27, 2007
Filed:
Jun. 25, 2004
Thomas D. Steiger, San Diego, CA (US);
Richard C. Ujazdowski, Poway, CA (US);
Timothy S. Dyer, Auburn, CA (US);
Thomas P. Duffey, San Diego, CA (US);
Walter D. Gillespie, Poway, CA (US);
Bryan G. Moosman, San Marcos, CA (US);
Richard G. Morton, San Diego, CA (US);
Brian D. Strate, San Diego, CA (US);
Thomas D. Steiger, San Diego, CA (US);
Richard C. Ujazdowski, Poway, CA (US);
Timothy S. Dyer, Auburn, CA (US);
Thomas P. Duffey, San Diego, CA (US);
Walter D. Gillespie, Poway, CA (US);
Bryan G. Moosman, San Marcos, CA (US);
Richard G. Morton, San Diego, CA (US);
Brian D. Strate, San Diego, CA (US);
Cymer, Inc., San Diego, CA (US);
Abstract
A gas discharge laser includes a laser chamber containing a halogen laser gas, two electrode elements defining a cathode and an anode, each having a discharge receiving region defining two longitudinal edges and having a region width defining a width of an electric discharge between the electrode elements in the laser gas. The anode comprising a first anode portion comprising a first anode material defining a first anode material erosion rate, located entirely within the discharge receiving region, a pair of second anode portions comprising a second anode material defining a second anode material erosion rate, respectively located on each side of the first anode portion and at least partially within the discharge receiving region; an electrode center base portion integral with the first anode portion; and wherein each of the respective pair of second anode portions is mechanically bonded to the center base portion.