The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 27, 2007
Filed:
Dec. 09, 2003
Applicants:
Dai Shinozaki, Nirasaki, JP;
Shigekazu Komatsu, Nirasaki, JP;
Inventors:
Dai Shinozaki, Nirasaki, JP;
Shigekazu Komatsu, Nirasaki, JP;
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 31/02 (2006.01);
U.S. Cl.
CPC ...
Abstract
In an inspection method according to the invention, a plurality of driversincorporated in a testerapply a fritting voltage to respective electrodes P via first probe pinsA included in pairs of first and second probe pinsA andB and connected to the respective drivers.