The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 27, 2007
Filed:
Nov. 10, 2006
Yu-cheng Tsao, Kaohsiung, TW;
Yu-Cheng Tsao, Kaohsiung, TW;
Advanced Semiconductor Engineering Inc., Kaohsiung, TW;
Abstract
An MEMS probe card with elastic multi-layer structure mainly includes a substrate and a plurality of MEMS probe assemblies. The MEMS probe assemblies are disposed on a plurality of testing pads of the substrate, and each of the MEMS probe assemblies includes a plurality of first layer bridge elements, a second layer bridge element and a probe tip. The first and the second layer bridge elements each forms a-shaped cross-section and has two piers and a beam. The piers of the second layer bridge elements are respectively disposed on the beams of the first layer elements, and the probe tips are disposed on the beams of the second layer bridge elements. According to the stacks formed by the second layer bridge elements disposing on the first layer bridge elements, the probe tips may have more elastic buffer and a better resistance to the compressive strain when probing the bumps or bonding pads on wafers.