The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 27, 2007
Filed:
Sep. 28, 2005
Applicants:
Bart Buijsse, Eindhoven, NL;
Mark Theo Meuwese, Eindhoven, NL;
Bernardus Jacobus Marie Bormans, Eindhoven, NL;
Hendrik Nicolaas Slingerland, Venlo, NL;
Hendrik Gezinus Tappel, Casteren, NL;
Inventors:
Bart Buijsse, Eindhoven, NL;
Mark Theo Meuwese, Eindhoven, NL;
Bernardus Jacobus Marie Bormans, Eindhoven, NL;
Hendrik Nicolaas Slingerland, Venlo, NL;
Hendrik Gezinus Tappel, Casteren, NL;
Assignee:
FEI Company, Hillsboro, OR (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01F 23/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A cluster tool includes multiple tools for microscopic processing of a sample positioned around a rotatable base. A sample holder on the base rotates the sample between the working areas of the tools. A slidable vacuum seal maintains a vacuum in a sample chamber for tools that require a vacuum.