The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 20, 2007
Filed:
May. 06, 2003
Applicants:
Anantha K. Subramani, San Jose, CA (US);
Anthony Vesci, San Jose, CA (US);
Scott Dickerson, Fremont, CA (US);
Inventors:
Anantha K. Subramani, San Jose, CA (US);
Anthony Vesci, San Jose, CA (US);
Scott Dickerson, Fremont, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C25D 5/10 (2006.01); C25D 5/22 (2006.01); C25D 7/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method of fabricating a sputtering target for sputter depositing material onto a substrate in a sputtering chamber is described. In one embodiment of the method, a preform having a surface is formed and a layer of sputtering material is electroplated onto the surface of the preform to form the target. The method can be applied to form a sputtering target having a non-planar surface.