The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 20, 2007
Filed:
Aug. 03, 2001
Nobuo Ishii, Hyogo, JP;
Kibatsu Shinohara, Kanagawa, JP;
Nobuo Ishii, Hyogo, JP;
Kibatsu Shinohara, Kanagawa, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A plasma device includes a first conductive plate () in which a plurality of slots () are formed, a second conductive plate () having a microwave inlet () and disposed opposite to the first conductive plate (), a ring member () for connecting peripheral edges of the first and second conductive plates (), and a conductive adjusting member () provided on said second conductive plate () within a radial waveguide () formed by the first and second conductive plates () and serving to adjust a distance (d1, d2) up to the first conductive plate (). With this arrangement, a desired electric field radiation distribution can be obtained without inducing abnormal discharge.