The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 20, 2007
Filed:
Feb. 23, 2004
Frank Dimeo, Jr., Danbury, CT (US);
Philip S. H. Chen, Bethel, CT (US);
Ing-shin Chen, Danbury, CT (US);
Jeffrey W. Neuner, Bethel, CT (US);
James Welch, New Fairfield, CT (US);
Frank Dimeo, Jr., Danbury, CT (US);
Philip S. H. Chen, Bethel, CT (US);
Ing-Shin Chen, Danbury, CT (US);
Jeffrey W. Neuner, Bethel, CT (US);
James Welch, New Fairfield, CT (US);
Advanced Technology Materials, Inc, Danbury, CT (US);
Abstract
A (MEMS)-based gas sensor assembly for detecting a fluorine-containing species in a gas containing same, e.g., an effluent of a semiconductor processing tool undergoing etch cleaning with HF, NF, etc. Such gas sensor assembly in a preferred embodiment comprises a free-standing silicon carbide support structure having a layer of a gas sensing material, preferably nickel or nickel alloy, coated thereon. Such gas sensor assembly is preferably fabricated by micro-molding techniques employing sacrificial molds that are subsequently removable for forming structure layers.