The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 06, 2007
Filed:
Dec. 23, 2004
Enrico Magni, Pleasanton, CA (US);
Michael Kelly, Pleasanton, CA (US);
Robert Hefty, Mountain View, CA (US);
Michelle Lupan, Danville, CA (US);
Enrico Magni, Pleasanton, CA (US);
Michael Kelly, Pleasanton, CA (US);
Robert Hefty, Mountain View, CA (US);
Michelle Lupan, Danville, CA (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
Methods for removing black silicon or black silicon carbide from a plasma-exposed surface of an upper electrode of a plasma processing chamber are provided. The methods include forming a plasma using a gas composition containing a fluorine-containing gas, and removing the black silicon or black silicon carbide from the surface with the plasma. The methods can also remove black silicon or black silicon carbide from surfaces of the components in the chamber in addition to the upper electrode.