The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 30, 2007
Filed:
Sep. 22, 2005
Niels DE Jonge, Eindhoven, NL;
Erik Petrus Antonius Maria Bakkers, Eindhoven, NL;
Louis Felix Feiner, Eindhoven, NL;
Antonio Maria Calvosa, Milan, IT;
Niels de Jonge, Eindhoven, NL;
Erik Petrus Antonius Maria Bakkers, Eindhoven, NL;
Louis Felix Feiner, Eindhoven, NL;
Antonio Maria Calvosa, Milan, IT;
FEI Company, Hillsboro, OR (US);
Koninklijke Philips Electronics N.V., Eindhoven, NL;
Abstract
The invention provides an electron source suitable for use in a charged-particle apparatus, in which source a beam of electrons can be extracted from an electrode that is subjected to at least one of an electric potential, thermal excitation and photonic excitation, whereby at least part of the electrode comprises semiconductor material having a conduction band that is quantized into discrete energy levels. Such a source enjoys a relatively low energy spread, typically much smaller than that of a Cold Field Emission Gun (CFEG). The semiconductor material may, for example, comprise a semiconductor nanowire including InAs and GaInAs.