The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 30, 2007
Filed:
Jul. 10, 2006
Ju-hwan Jung, Seoul, KR;
Jun-soo Kim, Seoul, KR;
Hyung-cheol Shin, Seoul, KR;
Seung-bum Hong, Seongnam-si, KR;
Ju-hwan Jung, Seoul, KR;
Jun-soo Kim, Seoul, KR;
Hyung-cheol Shin, Seoul, KR;
Seung-bum Hong, Seongnam-si, KR;
Samsung Electronics Co., Ltd., Gyeonggi-do, KR;
Seoul National University Industry Foundation, Seoul, KR;
Abstract
A semiconductor probe with a high-resolution tip and a method of fabricating the same are provided. The semiconductor probe includes: a cantilever doped with a first impurity; a resistive convex portion projecting from an end portion of the cantilever and lightly doped with a second impurity opposite in polarity to the first impurity; and first and second electrode regions formed on either side of the resistive convex portion and heavily doped with the second impurity.