The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 23, 2007
Filed:
May. 27, 2005
Nobuto Yasui, Kanagawa, JP;
Hiroshi Inaba, Yokohama, JP;
Shinji Sasaki, Kanagawa, JP;
Hiroshi Ishizaki, Kanagawa, JP;
Nobuto Yasui, Kanagawa, JP;
Hiroshi Inaba, Yokohama, JP;
Shinji Sasaki, Kanagawa, JP;
Hiroshi Ishizaki, Kanagawa, JP;
Hitachi Global Storage Technologies Netherlands B.V., Amsterdam, NL;
Abstract
Embodiments of the invention provide an air bearing surface protection film having good corrosive resistance, electrical insulative property and mechanical wear resistance in the state of an extremely thin film. In one embodiment, an air bearing surface protection film having good corrosive resistance, electrical insulative property and mechanical wear resistance in a state of an extremely thin film is obtained by disposing a thin silicon nitride film having high density, high electric resistance, chemical stability and high adhesion with a substrate as a lowermost air bearing surface protection film and disposing a film comprising tetrahedral amorphous carbon and nitrogen as an uppermost air bearing surface protection film.