The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 23, 2007
Filed:
Feb. 15, 2005
Applicant:
Srivatsa Kundalgurki, Dresden, DE;
Inventor:
Srivatsa Kundalgurki, Dresden, DE;
Assignee:
Infineon Technologies AG, Munich, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B08B 6/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
The present invention relates to the use of a Cto Calcohol during the cleaning step. With the use of said alcohol, the surface tension of the solution is reduced which allows the application of reduced megasonic power with increased cleaning efficiency.
Kundalgurki, Srivatsa. (2007). Enhanced megasonic based clean using an alternative cleaning chemistry (U.S. Patent No. 7284558). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7284558
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile