The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 16, 2007
Filed:
Feb. 14, 2006
Tomowaki Takahashi, Yokohama, JP;
Tomowaki Takahashi, Yokohama, JP;
Nikon Corporation, Tokyo, JP;
Abstract
A projection optical system has at least eight reflecting mirrors and is relatively compact in the radial direction. The eight reflecting mirrors (M˜M) form a reduced image of a first surface on a second surface. A first reflecting image forming optical system (G) forms a first intermediate image (IMI) of the first surface based on light from the first surface, a second reflecting image forming optical system (G) forms a second intermediate image (IMI) of the first surface based on light from the first intermediate image, and a third reflecting image forming optical system (G) forms a reduced image on the second surface based on light from the second intermediate image. The number of reflecting mirrors (M˜M) of the third reflecting image forming optical system is greater than the number of reflecting mirrors (M, M) of the first reflecting image forming optical system.