The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 16, 2007
Filed:
Dec. 21, 2005
Uwe Beier, Ottendorf-Okrilla, DE;
Dietmar Runge, Grosserkmannsdorf, DE;
Stefan Kreissig, Venusberg, DE;
Steffen Grauer, Strehla, DE;
Matthias Rottka, Grossenhain, DE;
Botho Hirschfeld, Dresden, DE;
Joerg Kiesewetter, Thiendorf OT Sacka, DE;
Uwe Beier, Ottendorf-Okrilla, DE;
Dietmar Runge, Grosserkmannsdorf, DE;
Stefan Kreissig, Venusberg, DE;
Steffen Grauer, Strehla, DE;
Matthias Rottka, Grossenhain, DE;
Botho Hirschfeld, Dresden, DE;
Joerg Kiesewetter, Thiendorf OT Sacka, DE;
Suss Microtec Test Systems GmbH, Sacka, DE;
Abstract
A device for testing thin elements, such as wafers or individual substrates, while at the same time offering a facility for inspecting the reverse side of the thin elements is provided in which any deflection of the substrate as a consequence of high contact power of the probe card is avoided and which is also suitable for substrate diameters of 200 mm and above. The device includes a stable plate with a central opening positioned on the basic construction, a frame which can be moved and/or turned on the plate in an x/y direction and, if required, in a theta direction, a highly-rigid substrate support which can be mounted in the frame, and substrates which can be mounted on the substrate support, wherein the mounting is effected through a vacuum, using mechanical elements (clamping ring, clamping foil or other suitable clamping elements), gel pack pads, or adhesive etc.