The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 16, 2007
Filed:
Feb. 28, 2005
Haico Victor Kok, Eindhoven, NL;
Marcus Adrianus Van DE Kerhof, Helmond, NL;
Borgert Kruizinga, Zoetermeer, NL;
Timotheus Franciscus Sengers, 's-Hertogenbosch, NL;
Bearrach Moest, Eindhoven, NL;
Marc Antonius Maria Haast, Eindhoven, NL;
Peter Weissbrodt, Weimar, NL;
Manfred Schrenk, Kahla, DE;
Torsten Harzendorf, Stadroda, DE;
Haico Victor Kok, Eindhoven, NL;
Marcus Adrianus Van De Kerhof, Helmond, NL;
Borgert Kruizinga, Zoetermeer, NL;
Timotheus Franciscus Sengers, 's-Hertogenbosch, NL;
Bearrach Moest, Eindhoven, NL;
Marc Antonius Maria Haast, Eindhoven, NL;
Peter Weissbrodt, Weimar, NL;
Manfred Schrenk, Kahla, DE;
Torsten Harzendorf, Stadroda, DE;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A sensor for use at substrate level in a high numerical aperature lithographic apparatus, the sensor having a transparent plate that covers a sensing element and includes elements that improve coupling of radiation into the sensing element. The elements include Fresnel lenses, holographic optical elements, inverted Winston Cones, spherical lenses and surface roughening.