The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 16, 2007
Filed:
Jun. 14, 2004
Yoshiaki Tanase, San Jose, CA (US);
William Norman Sterling, Santa Clara, CA (US);
Paul Andrew Haworth, Feniscowles, GB;
Yoshiaki Tanase, San Jose, CA (US);
William Norman Sterling, Santa Clara, CA (US);
Paul Andrew Haworth, Feniscowles, GB;
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Embodiments of the invention generally provide a slit valve door seal. In one embodiment, a slit valve door seal includes a ring-shaped base having a center axis and at least one finger extending from the base. The finger is oriented substantially parallel to the center axis, wherein the base and the finger define a single, one-piece seal member. The seal is particularly suitable for using in sealing substrate access passages formed in load lock chambers.