The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 09, 2007
Filed:
Apr. 08, 2004
Johannes Adrianus Antonius Theodorus Dams, Veldhoven, NL;
Robrecht Emiel Maria Leonia DE Weerdt, Hoogstraten, BE;
Johannes Adrianus Antonius Theodorus Dams, Veldhoven, NL;
Robrecht Emiel Maria Leonia De Weerdt, Hoogstraten, BE;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
In a scanning exposure, the short stroke module accelerates the mask or substrate table with a higher acceleration that the long stroke module. The short stroke module starts at or near (proximate) one extreme of its range of motion and catches up to the long stroke module during the scan. The long stroke module starts to decelerate earlier but the short stroke decelerates faster so that the short stroke overtakes the long stroke and ends up at the other extreme of its range of motion. The acceleration times can be reduced without increasing the forces exerted by the long stroke actuators so there is less of an increase in dissipation and reaction forces.