The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 09, 2007
Filed:
Sep. 02, 2004
Daniel F. Gealy, Kuna, ID (US);
Dave Chapek, Merrimack, NH (US);
Scott Deboer, Boise, ID (US);
Husam N. Al-shareef, Tustin, CA (US);
Randhir Thakur, San Jose, CA (US);
Daniel F. Gealy, Kuna, ID (US);
Dave Chapek, Merrimack, NH (US);
Scott DeBoer, Boise, ID (US);
Husam N. Al-Shareef, Tustin, CA (US);
Randhir Thakur, San Jose, CA (US);
Micron Technology, Inc., Boise, ID (US);
Abstract
A method and apparatus for preventing NO from becoming super critical during a high pressure oxidation stage within a high pressure oxidation furnace are disclosed. The method and apparatus utilize a catalyst to catalytically disassociate NO as it enters the high pressure oxidation furnace. This catalyst is used in an environment of between five (5) atmospheres to twenty-five (25) atmospheres NO and a temperature range of 600° C. to 750° C., which are the conditions that lead to the NO going super critical. By preventing the NO from becoming super critical, the reaction is controlled that prevents both temperature and pressure spikes. The catalyst can be selected from the group of noble transition metals and their oxides. This group can comprise palladium, platinum, iridium, rhodium, nickel, silver, and gold.