The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 09, 2007
Filed:
Mar. 09, 2004
Applicants:
Jung-hun Seo, Seoul, KR;
Gil-heyun Choi, Gyeonggi-do, KR;
Jong-myeong Lee, Gyeonggi-do, KR;
Hee-sook Park, Seoul, KR;
Inventors:
Jung-hun Seo, Seoul, KR;
Gil-Heyun Choi, Gyeonggi-do, KR;
Jong-Myeong Lee, Gyeonggi-do, KR;
Hee-sook Park, Seoul, KR;
Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/4763 (2006.01);
U.S. Cl.
CPC ...
Abstract
A conductive structure is formed in an integrated circuit device by forming a lower conductive pattern on a substrate. A barrier metal layer is formed on the lower conductive pattern. The barrier metal layer is flushed with a gas that includes a halogen group gas and an upper conductive layer is formed on the barrier metal layer.