The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 02, 2007
Filed:
Jan. 13, 2005
Applicants:
John A. Rule, Hingham, MA (US);
Paolo Zambon, San Diego, CA (US);
Tom A. Watson, Carlsbad, CA (US);
Omez S. Mesina, San Diego, CA (US);
Weijie Zheng, San Diego, CA (US);
Inventors:
John A. Rule, Hingham, MA (US);
Paolo Zambon, San Diego, CA (US);
Tom A. Watson, Carlsbad, CA (US);
Omez S. Mesina, San Diego, CA (US);
Weijie Zheng, San Diego, CA (US);
Assignee:
Cymer, Inc., San Diego, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01S 3/22 (2006.01);
U.S. Cl.
CPC ...
Abstract
The present invention relates to a fluorine gas discharge laser system and control of replenishment of fluorine gas as the gas discharge laser operates and consumes fluorine.