The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 02, 2007
Filed:
Dec. 22, 2004
Toshikazu Miyamoto, Yamaguchi, JP;
Tadashi Ohashi, Yamaguchi, JP;
Toshikazu Miyamoto, Yamaguchi, JP;
Tadashi Ohashi, Yamaguchi, JP;
Toshiba Ceramics Co., Ltd., Tokyo, JP;
Tokuyama Toshiba Ceramics Co., Ltd., Shunan-shi, JP;
Abstract
The barrel type susceptor for use in the semiconductor epitaxial growth is characterized in that a face plateof a susceptor main bodyhaving the shape of a truncated cone is partitioned into two or more in a longitudinal direction thereof, each partition being provided with a wafer mounting concave portionon which a wafer is laid, and the inclination angle θa, θb, θc of a bottom faceof the concave portion for each partition to the vertical line is gradually decreased in each partition from the upper part to the lower part.