The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 18, 2007
Filed:
Nov. 14, 2003
Yuri Kokotov, Maaleh Adumim, IL;
Efim Entin, Jersusalem, IL;
Jacques Seror, Jerusalem, IL;
Yossi Fisher, Jerusalem, IL;
Shalomo Sarel, Maaleh Michmas, IL;
Arulkumar P. Shanmugasundram, Sunnyvale, CA (US);
Alexander T. Schwarm, Austin, TX (US);
Young Jeen Paik, Campbell, CA (US);
Yuri Kokotov, Maaleh Adumim, IL;
Efim Entin, Jersusalem, IL;
Jacques Seror, Jerusalem, IL;
Yossi Fisher, Jerusalem, IL;
Shalomo Sarel, Maaleh Michmas, IL;
Arulkumar P. Shanmugasundram, Sunnyvale, CA (US);
Alexander T. Schwarm, Austin, TX (US);
Young Jeen Paik, Campbell, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A method, system, and medium of modeling and/or for controlling a manufacturing process is disclosed. In particular, a method according to embodiments of the present invention includes the step of identifying one or more input parameters. Each input parameter causes a change in at least two outputs. The method also includes the step of storing values of the identified inputs and corresponding empirical output values along with predicted output values. The predicted output values are calculated based on, in part, the values of the identified inputs. The method also includes the step of calculating a set of transform coefficients by minimizing a score equation that is a function of differences between one or more of the empirical output values and their corresponding predicted output values. The method further includes the steps of receiving a new set of values for the identified inputs, transforming the new set of values for the identified input using the set of coefficients, and calculating a set of predicted output values using the transformed input values.