The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 18, 2007
Filed:
Feb. 15, 2001
Applicants:
Joseph S Gordon, Gardiner, NY (US);
Gregory P Hughes, Austin, TX (US);
Franklin D Kalk, Austin, TX (US);
Hakki U Alpay, Poughquag, NY (US);
Inventors:
Joseph S Gordon, Gardiner, NY (US);
Gregory P Hughes, Austin, TX (US);
Franklin D Kalk, Austin, TX (US);
Hakki U Alpay, Poughquag, NY (US);
Assignee:
Toppan Photomasks, Inc., Round Rock, TX (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 5/28 (2006.01); G03F 1/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
An apparatus and method for optimizing a pellicle for off-axis transmission are disclosed. A pellicle includes a thin film optimized for transmission of off-axis incident light at a desired angle. The pellicle further includes an optical thickness greater than a design thickness by less than or equal to approximately one-quarter of an exposure wavelength.