The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 18, 2007
Filed:
May. 03, 2005
Edwin Teunis Van Donkelaar, Eindhoven, NL;
Evert Hendrink Jan Draaijer, Eindhoven, NL;
Leon Martin Levasier, Hedel, NL;
Nicolas Alban Lallemant, Veldhoven, NL;
Gerardus Martinus Antonius DE Rooij, Tilburg, NL;
Edwin Teunis Van Donkelaar, Eindhoven, NL;
Evert Hendrink Jan Draaijer, Eindhoven, NL;
Leon Martin Levasier, Hedel, NL;
Nicolas Alban Lallemant, Veldhoven, NL;
Gerardus Martinus Antonius De Rooij, Tilburg, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A lithographic apparatus includes a position quantity determination system to determine a position quantity of a movable part which is in operation at least partly surrounded by an area comprising a fluid. The position quantity determination system includes an interferometer system, a global sensor to determine a global value of a physical quantity of the fluid in the area, and a local sensor to determine a local value of the physical quantity of the fluid in the part of the area. The position quantity determination system is configured to determine the position quantity from an output of the interferometer, the global value of the physical quantity and the local value of the physical quantity. The physical quantity may include a pressure, a temperature, etc. The local physical quantity determination system may include a sensor, such as a high-speed sensor, a computational fluid dynamics model or a linear approximation model.