The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 18, 2007
Filed:
Nov. 27, 2002
Tomosuke Yoshida, Annaka, JP;
Takeshi Arai, Annaka, JP;
Kenji Akiyama, Nishishirakawa-gun, JP;
Hiroki Ose, Nishishirakawa-gun, JP;
Tomosuke Yoshida, Annaka, JP;
Takeshi Arai, Annaka, JP;
Kenji Akiyama, Nishishirakawa-gun, JP;
Hiroki Ose, Nishishirakawa-gun, JP;
Shin-Etsu Handotai Co., Ltd., Tokyo, JP;
Abstract
A susceptor () supporting a semiconductor substrate (W) in a vapor phase growth, wherein a pocket () is formed on an upper surface of the susceptor to arrange the semiconductor substrate (W) inside thereof. The pocket () has a two-stage structure having an upper stage pocket () for supporting an outer peripheral edge portion of the semiconductor substrate (W) and a lower stage pocket () formed on a lower stage of a center side from the upper stage pocket (). A hole () penetrated to a rear surface of the susceptor and opened in the vapor phase growth is formed in the lower stage pocket ().