The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 18, 2007
Filed:
May. 27, 2004
Carolina L. Elmufdi, Baltimore, MD (US);
Ravichandra V. Palaparthi, Newark, DE (US);
Carolina L. Elmufdi, Baltimore, MD (US);
Ravichandra V. Palaparthi, Newark, DE (US);
Rohm and Haas Electronic Materials CMP Holdings, Inc., Newark, DE (US);
Abstract
A polishing pad () for polishing a wafer () or other article, the pad having a groove network () configured to increase the residence time polishing medium () on the pad. The groove network has a first portion () that may extend substantially radially outwardly and an oscillating portion () that begins at a transition point () and is configured to slow the radially outward flow of the polishing medium.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile