The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 11, 2007
Filed:
Mar. 10, 2005
Applicants:
Wolfgang Vollrath, Burbach, DE;
Thomas Krieg, Solms, DE;
Inventors:
Wolfgang Vollrath, Burbach, DE;
Thomas Krieg, Solms, DE;
Assignee:
Vistec Semiconductor Systems GmbH, Weilburg, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 21/00 (2006.01); G01J 3/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
Examination devices and methods operating with incident light have hitherto been used for the examination of wafers. To allow these devices also to be used with the transmitted-light method, it is proposed to configure the substrate holder () so that an illumination device () is integrated into the substrate holder () in such a way that transmitted-light illumination of the wafer () is possible.