The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 11, 2007
Filed:
Sep. 13, 2005
Kazumichi Machida, Takarazuka, JP;
Atsuo Urata, Ibaraki, JP;
Teppei Kimura, Kobe, JP;
Nihon Denshizairyo Kabushiki Kaisha, Amagasaki-shi, JP;
Abstract
The invention aims to provide a vertical type probe card in which a probe can scrape an oxide film on a surface of an electrode of the measurement object, thereby ensuring stable contact with the electrode of the measurement object. A probe card A includes: first and second probesand; a guide substratein which a plurality of guide holesare formed through which the first and second probesandare inserted in a freely movable manner; a support memberprovided above the guide substrate; a first sheet memberof flexibility, attached to the support member, having a first electrode padon its surface, in which a tail endof the first probeprojecting out from the guide holeis brought into contact with the first electrode pad; a second sheet memberof flexibility, attached to the support member, having a second electrode padon its surface, in which a tail endof the second probeprojecting out from the guide holeand penetrating through the first sheet memberis brought into contact with the second electrode pad; and vibrating meansattached to the support member, wherein the vibrating meansvibrates the first and second probesandvia the support memberand the first and second sheet membersand