The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 11, 2007
Filed:
Oct. 28, 2005
Applicants:
Paul H. Townsend, Iii, Midland, MI (US);
Lynne K. Mills, Midland, MI (US);
Sheila Gombar-fetner, Midland, MI (US);
Inventors:
Paul H. Townsend, III, Midland, MI (US);
Lynne K. Mills, Midland, MI (US);
Sheila Gombar-Fetner, Midland, MI (US);
Assignee:
Dow Global Technologies Inc., Midland, MI (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C08G 77/08 (2006.01);
U.S. Cl.
CPC ...
Abstract
This invention is directed to a method of making a composition in which a silane having an unsaturated group and a silane having an aromatic group are hydrolyzed. In this method the more highly reactive silane is continuously added during the hydrolysis reaction of the less reactive silane. The composition can be used in the fabrication of microelectronic devices, particularly as hardmasks or etchstops.