The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 11, 2007
Filed:
Jan. 24, 2005
Stefan Jakschik, Dresden, DE;
Thomas Hecht, Dresden, DE;
Uwe Schröder, Dresden, DE;
Matthias Goldbach, Dresden, DE;
Stefan Jakschik, Dresden, DE;
Thomas Hecht, Dresden, DE;
Uwe Schröder, Dresden, DE;
Matthias Goldbach, Dresden, DE;
Infineon Technologies, AG, Neubiberg, DE;
Abstract
A process for modifying sections of a semiconductor includes covering the sections to remain free of doping with a metal oxide, e.g., aluminum oxide. Then, the semiconductor is doped, for example, from the gas phase, in those sections that are not covered by the aluminum oxide. Finally, the aluminum oxide is selectively removed again, for example using hot phosphoric acid. Sections of the semiconductor surface which are formed from silicon, silicon oxide or silicon nitride remain in place on the wafer.