The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 11, 2007

Filed:

Mar. 15, 2004
Applicants:

Dingjun Wu, Macungie, PA (US);

Bing Ji, Allentown, PA (US);

Philip Bruce Henderson, Allentown, PA (US);

Eugene Joseph Karwacki, Jr., Orefield, PA (US);

Inventors:

Dingjun Wu, Macungie, PA (US);

Bing Ji, Allentown, PA (US);

Philip Bruce Henderson, Allentown, PA (US);

Eugene Joseph Karwacki, Jr., Orefield, PA (US);

Assignee:

Air Products and Chemicals, Inc., Allentown, PA (US);

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 16/00 (2006.01); H05H 1/24 (2006.01);
U.S. Cl.
CPC ...
Abstract

A process for the selective removal of a TiO-containing substance from an article for cleaning applications is disclosed herein. In one embodiment, there is provided a process for removing a TiO-containing substance from an article comprising: providing the article having the TiO-containing substance deposited thereupon; reacting the substance with a reactive gas comprising at least one selected from a fluorine-containing cleaning agent, a chlorine-containing cleaning agent and mixtures thereof to form a volatile product; and removing the volatile product from the article to thereby remove the substance from the article.


Find Patent Forward Citations

Loading…