The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 11, 2007
Filed:
Jul. 06, 2005
Masato Yamazaki, Takaishi, JP;
Kenshi Mitsuishi, Tokyo, JP;
Isao Harada, Shimonoseki, JP;
Masao Tanaka, Takaishi, JP;
Kohichi Haruta, Takaishi, JP;
Koji Watari, Nagoya, JP;
Jin-yu Qiu, Nagoya, JP;
Yuji Hotta, Nagoya, JP;
Kimiyasu Sato, Nagoya, JP;
Masato Yamazaki, Takaishi, JP;
Kenshi Mitsuishi, Tokyo, JP;
Isao Harada, Shimonoseki, JP;
Masao Tanaka, Takaishi, JP;
Kohichi Haruta, Takaishi, JP;
Koji Watari, Nagoya, JP;
Jin-yu Qiu, Nagoya, JP;
Yuji Hotta, Nagoya, JP;
Kimiyasu Sato, Nagoya, JP;
Mitsui Chemicals, Inc., Tokyo, JP;
Advanced Industrial Science and Technology, Tokyo, JP;
Abstract
The present invention is to produce an aluminum nitride powder which is turned into a sintered body at a temperature of not more than 1600° C., thereby obtaining a sintered aluminum nitride in which the density and thermal conductivity are high and which can be properly used as a substrate material. Using a vapor phase reaction apparatus shown in FIG., ammonia gas was fed from a reactorheated at from 300 to 500° C. and maintained at that temperature by a heating sectionvia a feeding tubewhile being regulated by a flow regulator. At the same time, while being regulated by the flow regulator, nitrogen gas containing an organic aluminum compound is fed via a feeding tubeto obtain an aluminum nitride powder. The aluminum nitride powder is subjected to a heat treatment at from 1100 to 1500° C. in a reducing gas atmosphere and/or an inert gas atmosphere to obtain an aggregate aluminum nitride powder. The aggregate aluminum nitride powder is subjected to a mechanical treatment to obtain an aluminum nitride powder in which the specific surface area value is not less than 30 m/g and a ratio of an average particle diameter to a particle diameter in terms of the specific surface area is not more than 10.