The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 04, 2007
Filed:
Nov. 10, 2004
Applicants:
Johannes Rau, Gerstetten, DE;
Martin Mahlmann, Lauchheim, DE;
Inventors:
Johannes Rau, Gerstetten, DE;
Martin Mahlmann, Lauchheim, DE;
Assignee:
Carl Zeiss SMT AG, Oberkochen, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G02B 7/02 (2006.01);
U.S. Cl.
CPC ...
Abstract
A flange assembly of an optical system has a first flange, a compensation element and a second flange. The flanges and the compensation element are substantially axially symmetric both flanges (') being suitable for being connected to other components of the optical system in a non-destructive, non-positive axially separable fashion. The two flanges consist of different materials with different coefficients of linear thermal expansion. The compensation element is radially soft, but connects the two flanges rigidly in their relative spatial position.